TY  - BOOK
AU  - Delchar,T.A.
TI  - Vacuum physics and techniques / 
T2  - Physics and its Application
SN  - 0412465906
U1  - 533.5 
PY  - 1993///
CY  - London
PB  - Chapman & Hall, 
KW  - Physics
KW  - Vacuum physics
KW  - Vacuum technology
KW  - Vacuum techniques
N1  - Includes appendices and index
ER  -